JPH0416098Y2 - - Google Patents

Info

Publication number
JPH0416098Y2
JPH0416098Y2 JP1986152293U JP15229386U JPH0416098Y2 JP H0416098 Y2 JPH0416098 Y2 JP H0416098Y2 JP 1986152293 U JP1986152293 U JP 1986152293U JP 15229386 U JP15229386 U JP 15229386U JP H0416098 Y2 JPH0416098 Y2 JP H0416098Y2
Authority
JP
Japan
Prior art keywords
clean
ceiling
peripheral wall
clean room
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986152293U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6357449U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986152293U priority Critical patent/JPH0416098Y2/ja
Publication of JPS6357449U publication Critical patent/JPS6357449U/ja
Application granted granted Critical
Publication of JPH0416098Y2 publication Critical patent/JPH0416098Y2/ja
Expired legal-status Critical Current

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  • Ventilation (AREA)
JP1986152293U 1986-10-02 1986-10-02 Expired JPH0416098Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986152293U JPH0416098Y2 (en]) 1986-10-02 1986-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986152293U JPH0416098Y2 (en]) 1986-10-02 1986-10-02

Publications (2)

Publication Number Publication Date
JPS6357449U JPS6357449U (en]) 1988-04-16
JPH0416098Y2 true JPH0416098Y2 (en]) 1992-04-10

Family

ID=31070139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986152293U Expired JPH0416098Y2 (en]) 1986-10-02 1986-10-02

Country Status (1)

Country Link
JP (1) JPH0416098Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61168735A (ja) * 1985-01-21 1986-07-30 Hitachi Ltd クリ−ンル−ム

Also Published As

Publication number Publication date
JPS6357449U (en]) 1988-04-16

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